ENGINEERING

Viewpoint: Yes, EUVL is more promising than EPL.

Viewpoint: No, EUVL is not necessarily more promising than EPL as the NGL system. Although a replacement for optical lithography must be developed, the nature of that replacement remains to be determined.

Long ago, the word lithography referred to a printing process, developed at the end of the eighteenth century, that made use of grease and water. Lithography is still used today for printing, but in the present context, the term refers to the application of lithography in etching the patterns for integrated circuits and transistors on computer microchips.

Essential to the operation of modern computers, chips replaced vacuum...