Semiconductor International, June 1st, 2002
The chip designer maps out the circuits, the lithographer prints the circuits, and never the twain shall meet. Or something like that. But that is becoming an increasingly difficult -- and risky -- proposition. When chip features were wider than the wavelength of light used to print them, it was OK for EDA to not shake hands with the manufacturers. But as the technology nodes drop further and further below the source wavelengths, lithographers and designers must become more intimately involved.
"You can't Scotch tape a lithography solution on the back end anymore," said Ken Rygler, who's re...
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