Spectroscopy, April 1st, 2005
MEMS are small, microfabricated devices that are finding application in a variety of industries in both analytical and manufacturing settings. This paper reviews the properties of diffractive MEMS devices and examines their application in chemical spectroscopy.
The MEMS acronym, short for micro-electro-mechanical systems, evokes a vision of tiny machines (microsystems) that move. Indeed, a breathtaking array of microfabricated devices already is available commercially, and many more products are in various stages of development. What is common to the various MEMS devices is that, while being ...
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